CO2 laser annealing effects for Al-doped ZnO multilayered films
| Autor: | Jae-Hoon Ji, Jae-Geun Ha, Sang-Kwon Lee, Jung-Hyuk Koh, GaeHun Jo, Kamiko Masao |
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| Rok vydání: | 2018 |
| Předmět: |
Co2 laser
Materials science business.industry Annealing (metallurgy) Process Chemistry and Technology Doping 02 engineering and technology 010402 general chemistry 021001 nanoscience & nanotechnology Laser 01 natural sciences 0104 chemical sciences Surfaces Coatings and Films Electronic Optical and Magnetic Materials law.invention Wavelength Long wavelength law Materials Chemistry Ceramics and Composites Optoelectronics Rapid thermal annealing Thin film 0210 nano-technology business |
| Zdroj: | Ceramics International. 44:S211-S215 |
| ISSN: | 0272-8842 |
| DOI: | 10.1016/j.ceramint.2018.08.112 |
| Popis: | In this research, comparative optical annealing effects on Al-doped ZnO multilayer thin films were analyzed. Both a CO2 laser and the rapid thermal annealing (RTA) process were carried out and compared to test their annealing effects. The uniformly distributed long wavelength of a CO2 laser can penetrate into deeper areas from the surface of a thin film compared to that of a short wavelength of lasers such as UV and IR lasers. 4 different types of Al-doped ZnO thin films showed different stress/strain behaviors. In this research, different compositions of Al-doped ZnO thin films were prepared and annealed through both an optical annealing method using a laser and the RTA process. |
| Databáze: | OpenAIRE |
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