Autor:	N. Biziere, J. Grisolia
Rok vydání:	2013
Předmět:	Electrical and Electronic Engineering Condensed Matter Physics Atomic and Molecular Physics and Optics Surfaces Coatings and Films Electronic Optical and Magnetic Materials
Zdroj:	Microelectronic Engineering. 111:45
ISSN:	0167-9317
DOI:	10.1016/j.mee.2013.06.007
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::ac82f89d203fef1848342a21a951fd2f https://doi.org/10.1016/j.mee.2013.06.007 Zobrazit plný text záznamu Full Text from ScienceDirect