EELS microanalysis of polycrystalline silicon thin films for solar cells grown at low temperatures

Autor: Michael Stöger, Viktor Schlosser, M. Nelhiebel, Alexander Breymesser, Peter Schattschneider, Bernard Jouffrey
Rok vydání: 2000
Předmět:
Zdroj: Solar Energy Materials and Solar Cells. 63:177-184
ISSN: 0927-0248
DOI: 10.1016/s0927-0248(99)00172-5
Popis: The aim of this work is the quantitative chemical analysis of polycrystalline silicon thin "lms grown on glass substrates at temperatures (6003C by means of transmission electron microscopy (TEM) and electron energy-loss spectrometry (EELS). Specimens produced with two di!erent methods were investigated. We found signi"cant di!erences in grain size and morphology, as well as in the distribution of oxygen. A surprisingly high amount of Ba di!usion from the subtrate was detected. ( 2000 Published by Elsevier Science B.V. All rights reserved.
Databáze: OpenAIRE