EELS microanalysis of polycrystalline silicon thin films for solar cells grown at low temperatures
Autor: | Michael Stöger, Viktor Schlosser, M. Nelhiebel, Alexander Breymesser, Peter Schattschneider, Bernard Jouffrey |
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Rok vydání: | 2000 |
Předmět: |
Silicon
Renewable Energy Sustainability and the Environment Analytical chemistry chemistry.chemical_element Chemical vapor deposition engineering.material Microstructure Microanalysis Grain size Surfaces Coatings and Films Electronic Optical and Magnetic Materials law.invention Polycrystalline silicon chemistry Transmission electron microscopy law Solar cell engineering |
Zdroj: | Solar Energy Materials and Solar Cells. 63:177-184 |
ISSN: | 0927-0248 |
DOI: | 10.1016/s0927-0248(99)00172-5 |
Popis: | The aim of this work is the quantitative chemical analysis of polycrystalline silicon thin "lms grown on glass substrates at temperatures (6003C by means of transmission electron microscopy (TEM) and electron energy-loss spectrometry (EELS). Specimens produced with two di!erent methods were investigated. We found signi"cant di!erences in grain size and morphology, as well as in the distribution of oxygen. A surprisingly high amount of Ba di!usion from the subtrate was detected. ( 2000 Published by Elsevier Science B.V. All rights reserved. |
Databáze: | OpenAIRE |
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