Fabrication of two-scale texture by laser lithography
| Autor: | 赵恩兰 Zhao Enlan, 钱济国 Qian Jiguo, 朱华 Zhu Hua, 杨海峰 Yang Haifeng, 郝敬宾 Hao Jingbin, 唐玮 Tang Wei, 贺海东 He Haidong |
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| Rok vydání: | 2013 |
| Předmět: |
Fabrication
Materials science business.industry Extreme ultraviolet lithography Atomic and Molecular Physics and Optics law.invention Resist law Optoelectronics Stencil lithography X-ray lithography Electrical and Electronic Engineering Photolithography business Maskless lithography Next-generation lithography |
| Zdroj: | High Power Laser and Particle Beams. 25:2900-2904 |
| ISSN: | 1001-4322 |
| DOI: | 10.3788/hplpb20132511.2900 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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