Design improvements for a linear hybrid step micro-actuator

Autor: R. Gehrking, Hans H. Gatzen, M. Hahn, Bernd Ponick
Rok vydání: 2006
Předmět:
Zdroj: Microsystem Technologies. 12:646-649
ISSN: 1432-1858
0946-7076
DOI: 10.1007/s00542-006-0086-2
Popis: To increase the driving force as well as to reduce tolerance issues during assembly, a linear hybrid step micro-actuator developed within the cooperation time was subjected to a redesign. FEM simulation results show that, by doubling of the micro-actuator footprint in conjunction with a selective increase of the micro-actuator building height, an increase of the driving force could be achieved. At the same time, the nominal air gap could be doubled, thus substantially reducing critical assembly tolerances. This paper describes redesign considerations and present FEM simulation results for the redesign.
Databáze: OpenAIRE