P-12: 3-D TCAD Simulation for Describing Intrinsic Fluctuations in Polycrystalline Silicon Thin Film Transistors

Autor: Gun-Shik Kim, Seunghyun Jang, Dongjo Kim, Sung-Hwan Choi, Moon-Hyun Yoo, ByoungTaek Son
Rok vydání: 2016
Předmět:
Zdroj: SID Symposium Digest of Technical Papers. 47:1162-1164
ISSN: 0097-966X
Popis: In this work, we investigate the influence of grain boundaries on the performance of polycrystalline silicon thin-film transistors (poly-Si TFTs) for high resolution active-matrix organic light-emitting diode (AMOLED) displays using Voronoi diagram. The novel 2-D Voronoi polycrystalline grain structure can show a more realistic electrical parameter variability when the channel dimension is scaled down for high-resolution display. Using a proposed method, the impact of polycrystalline granular structure controlled by crystallization process is identified. Further, we predict the effect of grain boundary-induced variations under different laser annealing process, such as Excimer Laser Annealing (ELA).
Databáze: OpenAIRE