Autor:	Michael Bachmann, Felix Düsberg, Andreas Pahlke, Simon Edler, Andreas Schels, Florian Herdl, Robert Ławrowski, Rupert Schreiner
Rok vydání:	2022
Předmět:	Process Chemistry and Technology Materials Chemistry Electrical and Electronic Engineering Instrumentation Surfaces Coatings and Films Electronic Optical and Magnetic Materials
Zdroj:	Journal of Vacuum Science & Technology B. 40:010605
ISSN:	2166-2754 2166-2746
DOI:	10.1116/6.0001639
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::ac13dab69b82e67947dfa600791dc79c https://doi.org/10.1116/6.0001639 Zobrazit plný text záznamu