(Invited) Synergistic Effect of Polyvinyl Alcohol (PVA) Brush Type and Cleaning Chemistry Formulation for Copper (Cu) Post-Chemical Mechanical Planarization (p-CMP) Cleaning

Autor:	Jason J. Keleher, Kiana A. Cahue, Katherine M. Wortman-Otto, Abigail N. Linhart, Adam T Caridi, Abigail L. Dudek
Rok vydání:	2021
Předmět:	chemistry.chemical_compound Chemical engineering Chemistry law Chemical-mechanical planarization Brush chemistry.chemical_element Polyvinyl alcohol Copper law.invention
Zdroj:	ECS Meeting Abstracts. :655-655
ISSN:	2151-2043
DOI:	10.1149/ma2021-0214655mtgabs
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::ac0914d4c62b48e97823f653865f1856 https://doi.org/10.1149/ma2021-0214655mtgabs Zobrazit plný text záznamu