Formation of self-organized In0.5Ga0.5As quantum dots on GaAs by molecular beam epitaxy

Autor: Tzer-En Nee, Jia Lin Shieh, Ching-Ting Lee, Jen-Inn Chyi, Jen Wei Pan
Rok vydání: 1997
Předmět:
Zdroj: Journal of Crystal Growth. :777-781
ISSN: 0022-0248
DOI: 10.1016/s0022-0248(96)01034-2
Popis: Self-organized In 0.5 Ga 0.5 As quantum dots have been successfully grown on vicinal GaAs substrates by molecular beam epitaxy. The density of the quantum dots can be changed by nucleating the dots under different As overpressure. Substrate tilt angle of 15° results in much larger dot size and density than that of 4° due to the closely spaced step edges on the surface. Through investigations of the dots grown on In 0.1 Ga 0.9 As buffer, the strain energy of the buffer layer is also found to be an important factor that affects the size and density of the quantum dots.
Databáze: OpenAIRE