| Autor: |
David Molinero, Dana Dereus, Art Morris, Shawn J. Cunningham |
| Rok vydání: |
2014 |
| Předmět: |
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| Zdroj: |
2014 IEEE International Reliability Physics Symposium. |
| Popis: |
A dielectric charging characterization is presented based on simple MEMS structures with insulator-insulator contact. Surface charging is generated by triboelectric effects when the MEMS switch is actuated and both insulators are in contact. Hold-down measurements were done to characterize the surface charging over a broad range of voltage and temperature. The results have shown that the pull-in voltage shift is a key charging parameter with a characteristic temperature dependent time constant. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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