Adhesion improvement in diamond films by microlithographic patterning

Autor:	Alan B. Harker, Jeffrey F. DeNatale, John F. Flintoff
Rok vydání:	1992
Předmět:	Materials science Synthetic diamond Mechanical Engineering Nucleation Diamond Mineralogy Adhesion Substrate (electronics) Chemical vapor deposition engineering.material law.invention Mechanics of Materials law engineering General Materials Science Composite material Photolithography Thin film
Zdroj:	Journal of Materials Science. 27:553-556
ISSN:	1573-4803 0022-2461
DOI:	10.1007/bf00543949
Popis:	The use of microlithographic surface patterning has been investigated as a means of modifying the nucleation and adhesion of diamond films on non-compatible substrates. Significant improvements in film adhesion were achieved using this technique, to the point that interfacial integrity was maintained even at stress levels which induced subsurface fracture in the supporting substrate.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::ab8815f38e76b230741c50b7fd3a3a94 https://doi.org/10.1007/bf00543949 Zobrazit plný text záznamu Full text from SpringerLink