Facile and Stable n+ Doping Process Via Simultaneous Ultraviolet and Thermal Energy for Coplanar ALD-IGZO Thin-Film Transistors

Autor:	Hyun-Jun Jeong, Seong-Hwan Ryu, Jin-Seong Park, Donggyu Kim
Rok vydání:	2021
Předmět:	Materials science business.industry Doping medicine.disease_cause Electronic Optical and Magnetic Materials Thin-film transistor Scientific method Materials Chemistry Electrochemistry medicine Optoelectronics business Ultraviolet Thermal energy
Zdroj:	ACS Applied Electronic Materials. 3:3530-3537
ISSN:	2637-6113
DOI:	10.1021/acsaelm.1c00463
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::ab5c7d3c86de046f118ace43b84c8a65 https://doi.org/10.1021/acsaelm.1c00463 Zobrazit plný text záznamu