Picosecond laser scribing of bilayer molybdenum thin films on flexible polyimide substrate
| Autor: | David J. Hwang, Jeung-hyun Jeong, Zhen Wang, Won Mok Kim, Seungkuk Kuk |
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| Rok vydání: | 2019 |
| Předmět: |
Materials science
General Physics and Astronomy chemistry.chemical_element 02 engineering and technology Substrate (electronics) 010402 general chemistry 01 natural sciences law.invention law Sputtering Solar cell Thin film business.industry Bilayer Surfaces and Interfaces General Chemistry 021001 nanoscience & nanotechnology Condensed Matter Physics Laser Copper indium gallium selenide solar cells 0104 chemical sciences Surfaces Coatings and Films chemistry Molybdenum Optoelectronics 0210 nano-technology business |
| Zdroj: | Applied Surface Science. 493:320-330 |
| ISSN: | 0169-4332 |
| Popis: | Molybdenum (Mo) is a commonly used material as the electrical back contact for Cu(In,Ga)Se2 (CIGS) thin film solar cells taking advantages in electrical, structural and chemical properties. Bilayer structures have been actively examined to achieve Mo films of high conductivity with good substrate adhesion, which will also enable monolithically integrated solar cell modules on flexible platforms by combining laser scribing technology. However, reports on the bilayers on flexible substrates and their scribing by laser are very limited. In this study, we report the characteristics of bilayer Mo films deposited on a flexible polyimide substrate and the impact on the performance of picosecond laser scribing. Bilayer Mo films were deposited over a range of sputtering pressures and discharge powers as well as top-bottom layer thickness ratios, and laser scribing behavior was compared in the practical scribing speed range of the order of m/s. It is shown that microstructural and interfacial characteristics set by top and bottom Mo layers deposition parameters are critical factors influencing laser scribing quality. |
| Databáze: | OpenAIRE |
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