Vacuum Equipment and Application for Thin Film in the Multimedia. Deposition Technique for Capacitor Films with High Dielectric Constant

Autor:	Takaaki Kawahara
Rok vydání:	1997
Předmět:	Capacitor Materials science business.industry law General Engineering Electrical engineering Optoelectronics business Deposition (chemistry) High-κ dielectric law.invention
Zdroj:	Journal of the Surface Finishing Society of Japan. 48:1054-1058
ISSN:	1884-3409 0915-1869
DOI:	10.4139/sfj.48.1054
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::ab33f611bc764d4f48167c57aedf0da1 https://doi.org/10.4139/sfj.48.1054 Zobrazit plný text záznamu