Formation of Al2O3 Films by Low Pressure CVD Using ATI-O2 Sytem and Evaluation of Corrosion Resistances of the Films

Autor:	Katsuhisa Sugimoto, Kohei Amano
Rok vydání:	1992
Předmět:	Materials science Carbon film Mechanics of Materials Metallurgy Materials Chemistry Metals and Alloys Condensed Matter Physics Corrosion
Zdroj:	Journal of the Japan Institute of Metals. 56:184-190
ISSN:	1880-6880 0021-4876
DOI:	10.2320/jinstmet1952.56.2_184
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::ab261afb1e4ea4ce4e6e29c95ee90cd5 https://doi.org/10.2320/jinstmet1952.56.2_184 Zobrazit plný text záznamu