MOCVD of HTS and GMR perovskites by aerosol and liquid delivery MOCVD
| Autor: | Michael W. Carris, Klaus Hermann Dahmen |
|---|---|
| Rok vydání: | 1997 |
| Předmět: |
Materials science
Mechanical Engineering Inorganic chemistry Doping Metals and Alloys chemistry.chemical_element Chemical vapor deposition Surface coating Chemical engineering chemistry Mechanics of Materials Materials Chemistry Lanthanum Sapphire Deposition (phase transition) Metalorganic vapour phase epitaxy Layer (electronics) |
| Zdroj: | Journal of Alloys and Compounds. 251:270-277 |
| ISSN: | 0925-8388 |
| Popis: | Aerosol and liquid delivery MOCVD are techniques that were developed to overcome the problems with thermally less stable alkaline earth metal precursors in the deposition of alkaline earth doped HTS and GMR perovskites. In this paper, we will discuss the advantages and disadvantages of these techniques compared to the conventional MOCVD process. The deposition of CeO 2 films as an intermediate buffer layer for the deposition of YBa 2 Cu 3 O 7 on (1102) sapphire with Aerosol MOCVD will be discussed, as well as the deposition of alkaline earth doped lanthanum manganites, La 1 − x M x MnO 3 (M=Ca, Sr) on LaAlO 3 , MgO and YSZ by liquid delivery MOCVD. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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