First demonstration of flexible poly-Si nano-FETs (W/Lg= 50/80 nm) on the polyimide utilizing multi-wavelength laser annealing assisted by laser-buffer layer

Autor:	Po-Cheng Hou, Wen-Hsien Huang, Ming-Hsuan Kao, Shih-Wei Chen, Hsing-Hsiang Wang, Chang-Hong Shen, Jia-Min Shieh, Fu-Ming Pan, Li Chang
Rok vydání:	2022
Zdroj:	2022 6th IEEE Electron Devices Technology & Manufacturing Conference (EDTM).
DOI:	10.1109/edtm53872.2022.9797921
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::aac9c7db246f10f7fc9a4e9fba4450ba https://doi.org/10.1109/edtm53872.2022.9797921 Zobrazit plný text záznamu