Development of Evaluation Method for Geometrical Characterization of Polishing Pad Surface Texture Based on Contact Image Analysis Using Image Rotation Prism

Autor:	Kazutaka Shibuya, Ken-ichi Ishikawa, Kenji Okabe, Norihiko Moriya, Michio Uneda
Rok vydání:	2010
Předmět:	Image rotation Optics Materials science business.industry Mechanical Engineering Evaluation methods Polishing Development (differential geometry) Surface finish Prism business Image (mathematics) Characterization (materials science)
Zdroj:	Journal of the Japan Society for Precision Engineering. 76:1276-1282
ISSN:	1882-675X 0912-0289
DOI:	10.2493/jjspe.76.1276
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::aa97cf6995d09f72e02a9a239b78d759 https://doi.org/10.2493/jjspe.76.1276 Zobrazit plný text záznamu