Autor:	Bin Liu Zhao, Tie-Bang Xie, Dong-Lian Zheng
Rok vydání:	1993
Předmět:	Engineering Optics business.industry law Blazed grating Electronic engineering Electromagnetically induced grating Grating business Interference (wave propagation) Metrology law.invention
Zdroj:	SPIE Proceedings.
ISSN:	0277-786X
DOI:	10.1117/12.156500
Popis:	Grating interference technology because of its many advantages has been developed greatly in the field of fine metrology. The principle and characteristics of grating interference are analyzed and examples of its successful application are given.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::aa7fe72d9d511bea5eab8000a9ba7aad https://doi.org/10.1117/12.156500 Zobrazit plný text záznamu