(111) Orientation preferred L10 FePtB patterned by block copolymer templating

Autor:	Hao Su, Samuel C. Schwarm, Subhadra Gupta, Angelique Montgomery, Robert L. Douglas, Allen G. Owen
Rok vydání:	2014
Předmět:	Materials science Silicon Annealing (metallurgy) General Physics and Astronomy chemistry.chemical_element Sputter deposition Coercivity Crystallography chemistry Chemical engineering Reannealing Patterned media Copolymer Polymer blend
Zdroj:	Journal of Applied Physics. 116:113906
ISSN:	1089-7550 0021-8979
Popis:	The (111) orientation preferred L10 FePtB has been obtained by post-deposition annealing sputtered FeB/Pt multilayers on thermally oxidized silicon substrates. Block copolymer templating was employed to pattern FeBPt film. A matrix study of etch time and etch angle showed that ion-milling at 75° for 3 min yielded the highest coercivity. Reannealing after patterning process was found to improve the crystalline structure and coercivity significantly. These results suggested (111) orientation preferred L10 FePt patterned by block copolymer templating may be promising for tilted media and bit patterned media.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::aa57396ae9c666c305ae8668fca9a48a https://doi.org/10.1063/1.4895850 Zobrazit plný text záznamu