Current Stage of the Investigation of the Composition of Oxygen Precipitates in Czochralski Silicon Wafers
| Autor: | Andreas Sattler, Markus Andreas Schubert, Dawid Kot, G. Kissinger |
|---|---|
| Rok vydání: | 2017 |
| Předmět: |
010302 applied physics
Materials science Metallurgy 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences Electronic Optical and Magnetic Materials Oxygen precipitates 0103 physical sciences Wafer Composition (visual arts) Stage (hydrology) Current (fluid) 0210 nano-technology |
| Zdroj: | ECS Journal of Solid State Science and Technology. 6:N17-N24 |
| ISSN: | 2162-8777 2162-8769 |
| DOI: | 10.1149/2.0081704jss |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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