Decoration and Density Increase of Dislocations in PVT-Grown SiC Boules with Post-Growth Thermal Processing

Autor:	Gil Chung, Ian Manning, Andrey Soukhojak, Matthew Gave, Charles Lee
Rok vydání:	2022
Předmět:	Mechanics of Materials Mechanical Engineering General Materials Science Condensed Matter Physics
Zdroj:	Materials Science Forum. 1062:246-250
ISSN:	1662-9752
DOI:	10.4028/p-43627c
Popis:	Post-growth thermal processing at higher temperature generates more BPDs (basal plane dislocations). It is observed that dislocation visibility in surface inspection tool images varies significantly even at comparable dislocation densities. Combination of dislocation decoration and light absorbance from SiC matrix by point defects or dopants has been proposed as a working hypothesis to explain dislocation visibility variations.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::aa115d9e7f7712c0ee9ddc55da241de5 https://doi.org/10.4028/p-43627c Zobrazit plný text záznamu