Importance of Mechanical Stress Study in STI based BCD Technology

Autor:	Ladislav Seliga, Jaroslav Pjencak, Yasuhiro Takeda, Akihiro Hasegawa, Mitsuru Soma
Rok vydání:	2022
Zdroj:	2022 14th International Conference on Advanced Semiconductor Devices and Microsystems (ASDAM).
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::a9ec1167617060c83e870e7247dfc79f https://doi.org/10.1109/asdam55965.2022.9966755 Zobrazit plný text záznamu