CMOS-compatible field effect nanoscale gas-sensor: Operation and annealing models

Autor:	J. Woellenstein, A. Chaiyboun, M. Bauersfeld, Juan-Jesús Velasco-Vélez, Theodor Doll, C. Wilbertz
Rok vydání:	2008
Předmět:	Materials science CMOS business.industry Annealing (metallurgy) Logic gate Electronic engineering Field effect Optoelectronics Fokker–Planck equation Conductivity business Nanoscopic scale Cmos compatible
Zdroj:	2008 IEEE Sensors.
Popis:	Complete modelling of electrically controlled nanoscale gas sensors with Poisson, Wolkenstein, Fokker-Planck and continuity is presented. Based on a plausible Drift explanation we developed suitable models for sensitivity control and operational modes. An onset for CMOS-complying annealing procedures is given.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::a9d43833561425473b1f7c87830f38e6 https://doi.org/10.1109/icsens.2008.4716394 Zobrazit plný text záznamu