Experimental study of a pre-ionized high power pulsed magnetron discharge
Autor: | Marcel Meško, Jean-Christophe Imbert, D Pagnon, L. de Poucques, Michel Touzeau, Mihai Ganciu, J. Bretagne, Caroline Boisse-Laporte, Petr Vašina |
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Rok vydání: | 2007 |
Předmět: |
010302 applied physics
Chemistry Buffer gas Analytical chemistry 02 engineering and technology Plasma 021001 nanoscience & nanotechnology Condensed Matter Physics 7. Clean energy 01 natural sciences Cathode law.invention Electric arc law 0103 physical sciences Cavity magnetron Electrical measurements Electric current Atomic physics 0210 nano-technology Current density |
Zdroj: | Plasma Sources Science and Technology. 16:501-510 |
ISSN: | 1361-6595 0963-0252 |
Popis: | This paper is focused on experimental studies of a high power pulsed magnetron discharge stabilized by low current pre-ionization. Time resolved studies were performed for a Cu target by optical emission spectroscopy and electrical measurements for different pressures of Ar buffer gas. Due to the elimination of the statistical delay time and a fast discharge current rise the quasi-stationary state was reached in 6 µs. The quasi-stationary state is characterized by an extremely high and pressure independent discharge current density of ~10 A cm−2 and stable Cu+ and Cu++ emissions. Such fast discharge dynamics permits the magnetron cathode current to be driven with a pulse of duration of the order of a few µs, significantly shorter than in other devices. During this short time, the plasma does not have time to undergo the transition from the glow to the arc discharge even at the extremely high cathode loads met in our case. Different stages of the fast discharge development are identified and the composition of the magnetized plasma as a function of the pressure is discussed in detail. |
Databáze: | OpenAIRE |
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