| Autor: |
Ching-Hsiang Chan, Kuang-Tse Ho |
| Rok vydání: |
2020 |
| Předmět: |
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| Zdroj: |
International Symposium for Testing and Failure Analysis. |
| ISSN: |
0890-1740 |
| DOI: |
10.31399/asm.cp.istfa2020p0317 |
| Popis: |
This research summarizes a variety of physical failure modes of GaAs-based oxide-confined VCSELs and their root causes. Standard failure analysis procedure, which includes defect fault isolation by PEM or IR-OBIRCH and physical inspection by TEM analysis are also presented in detail. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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