Atomic precision imaging with an on-chip scanning tunneling microscope integrated into a commercial ultrahigh vacuum STM system
| Autor: | Ehud Fuchs, Afshin Alipour, James H. G. Owen, John N. Randall, S. O. Reza Moheimani |
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| Rok vydání: | 2021 |
| Předmět: |
Microelectromechanical systems
Materials science business.industry Process Chemistry and Technology Surfaces Coatings and Films Electronic Optical and Magnetic Materials law.invention law Materials Chemistry Optoelectronics Sensitivity (control systems) Electrical and Electronic Engineering Scanning tunneling microscope business Instrumentation |
| Zdroj: | Journal of Vacuum Science & Technology B. 39:040603 |
| ISSN: | 2166-2754 2166-2746 |
| DOI: | 10.1116/6.0001107 |
| Popis: | In this article, we replace the Z axis of the piezotube of a conventional Ultrahigh-Vacuum (UHV) Scanning Tunneling Microscope (STM) with a one-degree-of-freedom Microelectromechanical-System (MEMS) nanopositioner. As a result, a hybrid system is realized in which motions in the XY plane are carried out by the piezotube, while the MEMS device performs the Z-axis positioning with a smaller footprint and higher sensitivity. With the proposed system and a feedback loop, STM imaging is conducted on an H-passivated Si (100)-2 ×1 sample in a UHV condition, demonstrating that this on-chip STM is conducive to atomic precision scanning tunneling microscopy. |
| Databáze: | OpenAIRE |
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