Transfer of preheat-treated SnO2 via a sacrificial bridge-type ZnO layer for ethanol gas sensor
| Autor: | Ryeri Lee, Moon-Ho Ham, Namsoo Lim, Sun Kil Kang, Yusin Pak, Yogeenth Kumaresan, Da Hoon Lee, Sungeun Lee, Chaedeok Lee, Gun Young Jung |
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| Rok vydání: | 2018 |
| Předmět: |
Materials science
Analytical chemistry Sintering 02 engineering and technology 010402 general chemistry 01 natural sciences Etching Materials Chemistry Ethanol fuel Electrical and Electronic Engineering Instrumentation Microelectromechanical systems business.industry Metals and Alloys 021001 nanoscience & nanotechnology Condensed Matter Physics Tin oxide 0104 chemical sciences Surfaces Coatings and Films Electronic Optical and Magnetic Materials Electrochemical gas sensor Electrode Optoelectronics 0210 nano-technology business Layer (electronics) |
| Zdroj: | Sensors and Actuators B: Chemical. 255:70-77 |
| ISSN: | 0925-4005 |
| DOI: | 10.1016/j.snb.2017.08.025 |
| Popis: | The progress in developing the microelectromechanical system (MEMS) heater-based SnO 2 gas sensors was hindered by the subsequent heat treatment of the tin oxide (SnO 2 ), nevertheless it is required to obtain excellent sensor characteristics. During the sintering process, the MEMS heater and the contact electrodes can be degraded at such a high temperature, which could reduce the sensor response and reliability. In this research, we presented a process of preheating the printed SnO 2 sensing layer on top of a sacrificial bridge-type ZnO layer at such a high temperature, followed by transferring it onto the contact electrodes of sensor device by selective etching of the sacrificial ZnO layer. Therefore, the sensor device was not exposed to the high sintering temperature. The SnO 2 gas sensor fabricated by the transfer process exhibited a rectangular sensing curve behavior with a rapid response of 52 s at 20 ppm ethanol concentration. In addition, reliable and repeatable sensing characteristics were obtained even at an ethanol gas concentration of 5 ppm. |
| Databáze: | OpenAIRE |
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