Mechanical Properties and Toughening of a Polymethylsilsesquioxane Network

Autor: Bizhong Zhu, Dimitris E. Katsoulis, Frederick J. McGarry, Gregg Alan Zank
Rok vydání: 1999
Předmět:
Zdroj: MRS Proceedings. 594
ISSN: 1946-4274
0272-9172
DOI: 10.1557/proc-594-257
Popis: Polysilsesquioxanes are finding wider uses in microelectronics. However these materials are brittle and their mechanical behaviors need to be better understood. In this paper the mechanical properties of a cured methyl silsesquioxane network are studied and they are found to vary strongly with curing conditions. In the investigated curing temperature range there seems to be a correlation between the fracture toughness (KIc) and the viscoelastic transitions, which are affected by the network crosslink density. A higher crosslink density suppresses the cc and β transitions and reduces the KIc. A toughening approach is designed and its applicability is demonstrated by the increased fracture toughness.
Databáze: OpenAIRE