Mechanical Properties and Toughening of a Polymethylsilsesquioxane Network
Autor: | Bizhong Zhu, Dimitris E. Katsoulis, Frederick J. McGarry, Gregg Alan Zank |
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Rok vydání: | 1999 |
Předmět: | |
Zdroj: | MRS Proceedings. 594 |
ISSN: | 1946-4274 0272-9172 |
DOI: | 10.1557/proc-594-257 |
Popis: | Polysilsesquioxanes are finding wider uses in microelectronics. However these materials are brittle and their mechanical behaviors need to be better understood. In this paper the mechanical properties of a cured methyl silsesquioxane network are studied and they are found to vary strongly with curing conditions. In the investigated curing temperature range there seems to be a correlation between the fracture toughness (KIc) and the viscoelastic transitions, which are affected by the network crosslink density. A higher crosslink density suppresses the cc and β transitions and reduces the KIc. A toughening approach is designed and its applicability is demonstrated by the increased fracture toughness. |
Databáze: | OpenAIRE |
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