Transparent and flexible heaters based on Al:ZnO degenerate semiconductor
Autor: | J. R. Skuza, Gilbert Kogo, Rajeh Mundle, Monee K. Roul, Aswini K. Pradhan, Brandon Obasogie |
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Rok vydání: | 2017 |
Předmět: |
010302 applied physics
chemistry.chemical_classification Materials science business.industry Wide-bandgap semiconductor General Physics and Astronomy 02 engineering and technology Polymer Sputter deposition 021001 nanoscience & nanotechnology 01 natural sciences Degenerate semiconductor chemistry.chemical_compound chemistry 0103 physical sciences Polyethylene terephthalate Optoelectronics Thin film 0210 nano-technology business Joule heating Sheet resistance |
Zdroj: | Journal of Applied Physics. 122:135110 |
ISSN: | 1089-7550 0021-8979 |
Popis: | We report on high performance transparent Al:ZnO (AZO) thin film heaters on flexible polymer (polyethylene terephthalate) and glass substrates which demonstrate low sheet resistivity. AZO thin films were grown by radio-frequency magnetron sputtering at low Ts (below 200 °C) on flexible, transparent polyethylene terephthalate substrates that show stable and reproducible results by applying low ( |
Databáze: | OpenAIRE |
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