Semitransparent soft x-ray multilayer mirrors
| Autor: | A. Madouri, Yves Lepetre, M. Ouahabi, F. R. Ladan, R. Barchewitz, Chantal Khan Malek, Jean-Rene Rivoira, Jean Susini |
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| Rok vydání: | 1990 |
| Předmět: |
Materials science
Fabrication Silicon business.industry Flatness (systems theory) General Engineering chemistry.chemical_element Atomic and Molecular Physics and Optics law.invention chemistry.chemical_compound Optics Multilayer soft lithography chemistry law Etching (microfabrication) Silicon carbide Photolithography Thin film business |
| Zdroj: | Optical Engineering. 29:597 |
| ISSN: | 0091-3286 |
| DOI: | 10.1117/12.55634 |
| Popis: | We report on the conception, fabrication, and characterization of a multilayer beamsplitter for use at oblique incidence in the soft x-ray range. Thin film deposition, conventional patterning, and anisotropic etch techniques are used to produce the self-supporting silicon carbide carrier film. Large-area Mo/C multilayer beamsplitters (1 cm2) were fabricated. Experimental results on the reflection and transmission at 1.33 nm are presented and compared with theoretical calculations. The role of the supporting film and the flatness of the structure are addressed. Our process is compared with existing approaches from the literature. |
| Databáze: | OpenAIRE |
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