High throughput PIAD with an advanced RF-plasma source and direct optical monitoring

Autor:	Alfons Zöller, Harro Hagedorn, Detlef Arhilger, Michael Boos, Holger Reus
Rok vydání:	2016
Předmět:	Materials science Coating system business.industry Electronic engineering Optoelectronics Monitoring system Plasma Wideband business Throughput (business) Photon counting
Zdroj:	Optical Interference Coatings 2016.
DOI:	10.1364/oic.2016.wa.8
Popis:	High throughput and accuracy of a PIAD coating system with a large dome and an advanced RF-plasma source is demonstrated. Thickness monitoring was performed with a newly developed wideband monitoring system.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::a7f66eec7ff31a7e64ae6f5ed7e670b5 https://doi.org/10.1364/oic.2016.wa.8 Zobrazit plný text záznamu