Micromolding of Pb and Zn with Surface Engineered LiGA Mold Inserts

Autor:	K. W. Kelly, D. M. Cao, D. J. Guidry, Wen Jin Meng
Rok vydání:	2002
Předmět:	Insert (composites) Materials science Scanning electron microscope Metallurgy Molding (process) medicine.disease_cause Metal Mold visual_art medicine visual_art.visual_art_medium Surface modification Ceramic Composite material LIGA
Zdroj:	MRS Proceedings. 741
ISSN:	1946-4274 0272-9172
DOI:	10.1557/proc-741-j10.5
Popis:	Molding of Pb and Zn metal plates with LiGA (Lithographie, Galvanoformung, Abformung) fabricated Ni micro-scale mold inserts was carried out with as fabricated Ni inserts and Ni inserts conformally coated with Ti-containing hydrocarbon (Ti-C:H) coatings. The molding performance was characterized using scanning electron microscopy (SEM) and energy-dispersive spectroscopy (EDS), in terms of the generated features on the metal plates as well as the inserts condition after molding. The present results demonstrate that, in cases where significant metal/insert chemical interactions exist, surface modification of the mold insert is necessary to obtain satisfactory performance. Furthermore, conformal deposition of suitable engineered ceramic coatings onto Ni micro-scale mold inserts is effective for high temperature micromolding of reactive metals.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::a7d8aaefadcbce7e149a1ca6c6442443 https://doi.org/10.1557/proc-741-j10.5 Zobrazit plný text záznamu Full text from SpringerLink