Fabrication of CNT-carbon composite microstructures using Si micromolding and pyrolysis

Autor:	Liang He, Rüdiger Berger, Masaya Toda, Yusuke Kawai, Takahito Ono, Mamoru Omori, Toshiyuki Hashida, Hidetoshi Miyashita
Rok vydání:	2013
Předmět:	Fabrication Materials science Composite number Nanotechnology Carbon nanotube Photoresist Nanoindentation Condensed Matter Physics Microstructure Electronic Optical and Magnetic Materials law.invention Hardware and Architecture law Nano Electrical and Electronic Engineering Microfabrication
Zdroj:	Microsystem Technologies. 20:201-208
ISSN:	1432-1858 0946-7076
DOI:	10.1007/s00542-013-1771-6
Popis:	A fabrication method of carbon nanotube (CNT)-carbon composite microstructures has been developed. CNT-carbon composite microstructures with dimensions from 10 micrometers to several hundred micrometers have been fabricated by pyrolysis process from the patterned SU-8 photoresist mixed with 1 wt% of CNTs at temperature of ~600 °C under inert atmosphere. The resulting composite microstructures with a high aspect ratio of ~34 can be successfully fabricated by this novel fabrication method. This research provides a simple approach that is compatible with microfabrication technology and is capable of fabricating composite microstructures with reproducible shape and dimensions, at desired locations. This approach has potential for the further exploring of applications of composite micro/nano structures as functional units in various microdevices. Also the ultramicroindentation hardness of the CNT-carbon composite films was investigated by nanoindentation measurement.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::a7c92b4381b3471adc0067774e4d4f9f https://doi.org/10.1007/s00542-013-1771-6 Zobrazit plný text záznamu Full text from SpringerLink