Preparation of biaxially textured CeO2 buffer layers by ion beam-assisted deposition
| Autor: | J. Wang, R Fromknecht, G Linker |
|---|---|
| Rok vydání: | 2002 |
| Předmět: |
Diffraction
Materials science Analytical chemistry Surfaces and Interfaces General Chemistry Condensed Matter Physics Buffer (optical fiber) Surfaces Coatings and Films Ion Amorphous solid Materials Chemistry Deposition (phase transition) Texture (crystalline) Composite material Ion beam-assisted deposition Quartz |
| Zdroj: | Surface and Coatings Technology. :548-551 |
| ISSN: | 0257-8972 |
| Popis: | CeO 2 buffer layers were prepared on amorphous quartz glass substrates by the ion beam-assisted deposition (IBAD) technique at room temperature. The structural properties of the films were thoroughly investigated under different deposition parameters by X-ray diffraction (XRD). It was shown that the in-plane and out-of-plane textures of the CeO 2 films were controlled by the deposition parameters. Under optimized experimental conditions, good biaxially textured CeO 2 films, with out-of-plane mosaic spreads of 4.1° and in-plane alignment of 16°, could be achieved. The possible mechanism is discussed. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|
Full Text from ScienceDirect