Generation of Various Complex Patterned Structures From a Single Ellipsoidal Dot Prepattern by Capillary Force Lithography

Autor:	Hannes Jung, Francesco Stellacci, Jin Mi Jung
Rok vydání:	2007
Předmět:	chemistry.chemical_classification Materials science Fabrication Capillary action Mechanical Engineering Replica Nanotechnology Polymer Stamping medicine.disease_cause chemistry Mechanics of Materials Mold medicine General Materials Science Reactive-ion etching Lithography
Zdroj:	Advanced Materials. 19:4392-4398
ISSN:	1521-4095 0935-9648
DOI:	10.1002/adma.200701310
Popis:	Creating many different complex structures from a single prepattern is achieved from either a master mold or stamping onto a solid substrate by patterning with a PDMS replica mold. Various metal patterns including ellipses, dots, rings, chains of dots (or rings), ribbons and wavy lines with various feature sizes can be generated from a single pattern of isolated ellipsoidal dots by simply varying the residual polymer film thickness and the reactive ion etching (RIE) time.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::a7a4af4bd7d2b91c03fe401c8b15044e https://doi.org/10.1002/adma.200701310 Zobrazit plný text záznamu Plný text