An analytical model for pull-in voltage of clamped–clamped multilayer beams
Autor: | Hua Rong, Wei-Hua Li, Meng Nie, Qing-An Huang |
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Rok vydání: | 2004 |
Předmět: |
Physics::Computational Physics
Quantitative Biology::Biomolecules Materials science business.industry Metals and Alloys Structural engineering Condensed Matter Physics Surfaces Coatings and Films Electronic Optical and Magnetic Materials Compressive strength Deflection (engineering) Energy method Physics::Accelerator Physics Pull in voltage Electrical and Electronic Engineering Material properties business Instrumentation Fem simulations Voltage |
Zdroj: | Sensors and Actuators A: Physical. 116:15-21 |
ISSN: | 0924-4247 |
Popis: | This paper develops an analytical model for the deflection of clamped–clamped multilayer beams as a function of applied voltage by the energy method. The normalized displacement of the center of the beams and the pull-in voltage have been obtained, the model is also suitable to clamped–clamped beams with compressive stress. The model results are compared with FEM simulations, provided by the CosolveEM module in Coventorware, showing excellent agreement. This provides an approach of extracting material properties for the multilayer beams. |
Databáze: | OpenAIRE |
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