Jet Vapor Deposition of Lead Zirconate Titanate (PZT) for Thin Film Pyroelectric Detectors

Autor:	Y. D. Di, J. J. Schmitt, A. Bartlett, B. L. Halpern, J.W. Golz, Phil Cirino
Rok vydání:	1992
Předmět:	Materials science business.industry Chemical vapor deposition Dielectric Lead zirconate titanate Grain size Pyroelectricity chemistry.chemical_compound chemistry Electrical resistivity and conductivity Optoelectronics Thin film business Perovskite (structure)
Zdroj:	MRS Proceedings. 284
ISSN:	1946-4274 0272-9172
DOI:	10.1557/proc-284-541
Popis:	Thin films of pyroelectric PZT deposited by Jet Vapor Deposition are considered here for application in IR detector arrays. PZT films of 0.5 μm thickness were deposited on platinum coated insulating substrates and then annealed to increase the perovskite grain size. Capacitor test structures were used to measure the dielectric constant, loss, AC resistivity, and pyroelectric coefficient. We compare the results with known values for bulk PZT and discuss their relevance to detector design and performance.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::a752104dab0f04fdf05e3eb27bb4f30f https://doi.org/10.1557/proc-284-541 Zobrazit plný text záznamu Full text from SpringerLink