Investigation of laser-patterned silicon transmittance in the frequency range of 0.1-4.7 THz
| Autor: | Evaldas Svirplys, Heiko Richter, Till Hagelschuer, Gediminas Račiukaitis, Linas Minkevičius, Heinz-Wilhelm Hübers, Simonas Indrisiunas, Irmantas Kašalynas, Andrzej Urbanowicz |
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| Rok vydání: | 2019 |
| Předmět: |
inorganic chemicals
Materials science Silicon Terahertz radiation chemistry.chemical_element 02 engineering and technology complex mixtures 01 natural sciences law.invention 010309 optics law 0103 physical sciences Transmittance Surface roughness Absorption (electromagnetic radiation) Argon Scattering business.industry technology industry and agriculture equipment and supplies 021001 nanoscience & nanotechnology Laser stomatognathic diseases chemistry Optoelectronics 0210 nano-technology business |
| Zdroj: | 2019 44th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz). |
| Popis: | the dependence of THz transmittance on the surface roughness of differently laser-patterned silicon was investigated in the frequency range of 0.1-4.7 THz. The scattering of THz waves on rough silicon surface was found as the main mechanism that determines optical losses of laser-ablated silicon. The impact on the THz absorption losses of the silicon processed in ambient air and argon enriched environment was also discussed. |
| Databáze: | OpenAIRE |
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