Vertically Aligned Carbon Nanotube Arrays for Room Temperature Gas Sensors

Autor:	Dali Qian, Sovannary Phok, Vijay P. Singh, Ning Ma, Suresh Rajaputra, Rodney Andrews, Raghu Mangu, Janet K. Lumpp, Patricia Clore
Rok vydání:	2007
Předmět:	Nanotube Materials science Hybrid physical-chemical vapor deposition Anodizing business.industry Oxide Nanotechnology Carbon nanotube law.invention chemistry.chemical_compound Semiconductor Amorphous carbon chemistry law Composite material business Sheet resistance
Zdroj:	MRS Proceedings. 1057
ISSN:	1946-4274 0272-9172
DOI:	10.1557/proc-1057-ii20-08
Popis:	Vertically aligned multiwalled carbon nanotube (CNT) arrays were fabricated in anodized aluminum oxide (AAO) templates without the use of a catalyst, using xylene pyrolysis. The CNT arrays in AAO template were integrated into a resistive sensor design. The sensors were found to be highly responsive to NH3 and NO2 with steady state sensitivities of 5% and 10% for 100ppm of NH3 and NO2 respectively, at room temperature. Results were interpreted in terms of the CNTs acting as p-type semiconductors. A study was undertaken to elucidate the dependence of sensitivity on the thickness of the conducting amorphous carbon layers on top and bottom. Recovery of the MWNT gas sensor was studied for different types of desorption techniques. The thickness of the amorphous carbon layer (sheet resistance) was found to be critical in determining the sensor response.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::a739737d9203375733a58e1d37d90c38 https://doi.org/10.1557/proc-1057-ii20-08 Zobrazit plný text záznamu Full text from SpringerLink