Identification of different gas-phase reaction modes of WF6 with SiH4 for deposition of WSin films: powder formation and WSin cluster synthesis
| Autor: | N. Uchida, Toshihiko Kanayama, N. Okada, S. Ogawa |
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| Rok vydání: | 2018 |
| Předmět: | |
| Zdroj: | Extended Abstracts of the 2018 International Conference on Solid State Devices and Materials. |
| DOI: | 10.7567/ssdm.2018.ps-1-23 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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