| Autor: |
Roberto Gonella, Tomasz Brozek, Meindert Lunenborg, J.-C. Giraudin, Christopher Hess, B. Martinet, Franck Arnaud, Laurent Garchery, Kelvin Doong, Christian Dutto |
| Rok vydání: |
2019 |
| Předmět: |
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| Zdroj: |
2019 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S). |
| Popis: |
FDSOI technology has been proposed as an alternative device scaling path which offers benefits of tunable, superior electrostatics transistor while maintaining simplicity of planar integration. New device type and integration elements brought up challenges in device and process characterization and monitoring across the whole lifecycle of the technology. This paper presents successful application of fast cycle-time electrical characterization to ramp FDSOI technology to mass production. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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