A novel squeezed-film damping model for MEMS comb structures
| Autor: | Shuangqin Liu, Zouhair Sbiaa, Aveek N. Chatterjee, Hyun-Kee Chang, Alexandre Sinding, Stephen Breit, Ibrahim M. Elfadel, Ilker Ender Ocak, Wajih U. Syed, Jun Yan, Christopher Welham, Arnaud Parent |
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| Rok vydání: | 2017 |
| Předmět: |
Microelectromechanical systems
Engineering Computer simulation business.industry Magnetometer Acoustics 010401 analytical chemistry Gyroscope 02 engineering and technology 021001 nanoscience & nanotechnology Comb finger 01 natural sciences 0104 chemical sciences law.invention Model validation Control theory law Q factor 0210 nano-technology business |
| Zdroj: | 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS). |
| DOI: | 10.1109/transducers.2017.7994487 |
| Popis: | We present the implementation and validation of a novel model for simulating comb squeezed-film damping. The model is computationally efficient regardless of finger count and optionally includes top and bottom encapsulation surfaces surrounding the fingers. Comparison with standard numerical simulation shows a difference in damping coefficient of less than 1%. One application is to predict the Q factors of resonant MEMS such as gyroscopes for which a high Q-factor ensures stable oscillations and certain magnetometers for which it amplifies the sensitivity. The model is validated against experimental Q factors of a magnetometer, predicted values are within 10% of measurement from 0.01MPa to 100Pa. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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