Autor:	Yuho Kanaya, Yoji Watanabe, Yusuke Saito, Toshiaki Sakamoto, Ryota Matsui, Yosuke Okudaira, Shunsuke Kibayashi, Koshi Komuro, Hiroyuki Tsukamoto, Soichi Owa, Thomas Koo, David Tseng, Conrad Sorensen, Sujuan Li, Stephen Renwick, Noriyuki Hirayanagi, Bausan Yuan
Rok vydání:	2022
Zdroj:	Photomask Technology 2022.
DOI:	10.1117/12.2641419
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::a635984af57a598fc4648046dc7b5d71 https://doi.org/10.1117/12.2641419 Zobrazit plný text záznamu