The method of processing data of mass spectrometric analysis of vacuum medium of quartz resonator-thermostats

Autor:	G. Zh Khudaibergenov, A. M. Yarosh, V. I. Strunin, K. A. Belousov
Rok vydání:	2021
Předmět:	History Materials science law Analytical chemistry Quartz resonator Thermostat Mass spectrometric Computer Science Applications Education law.invention
Zdroj:	Journal of Physics: Conference Series. 1791:012112
ISSN:	1742-6596 1742-6588
Popis:	The theoretical and practical development of gas environmental analysis with the usage of a complex based on a residual gas analyzer is briefly presented. The data of technological search of annealing, degassing and sealing modes of quartz resonators and generators with participation of authors are summarized. The gas flow rate was estimated from the mass spectra. The method of measurement of working parameters of products, as well as estimation of operating time resource is proposed. Measurement of quartz resonator-thermostats (QRT) parameters is performed using serial technologies.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::a61b265ead57f6cb059ad2743e6b4d2b https://doi.org/10.1088/1742-6596/1791/1/012112 Zobrazit plný text záznamu