The use of test masks in the analysis of device yields

Autor: G.C. Day, S.J. Rhodes
Rok vydání: 2002
Předmět:
Zdroj: ICMTS 93 Proceedings of the 1993 International Conference on Microelectronic Test Structures.
DOI: 10.1109/icmts.1993.292920
Popis: A product specific test mask is used to analyze circuit yield and associate it with device parameter yield, which can then more easily be related to process failure. Once a consistent failure mode has been identified, it is found that a problem specific test mask is also required to finally effect a solution. An example of this yield diagnosis methodology is described based on a nonvolatile static RAM (SRAM) circuit. >
Databáze: OpenAIRE