The use of test masks in the analysis of device yields
Autor: | G.C. Day, S.J. Rhodes |
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Rok vydání: | 2002 |
Předmět: | |
Zdroj: | ICMTS 93 Proceedings of the 1993 International Conference on Microelectronic Test Structures. |
DOI: | 10.1109/icmts.1993.292920 |
Popis: | A product specific test mask is used to analyze circuit yield and associate it with device parameter yield, which can then more easily be related to process failure. Once a consistent failure mode has been identified, it is found that a problem specific test mask is also required to finally effect a solution. An example of this yield diagnosis methodology is described based on a nonvolatile static RAM (SRAM) circuit. > |
Databáze: | OpenAIRE |
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