Analysis of boron- and phosphorus-doped diamond layers by glow discharge optical emission spectroscopy in argon and neon

Autor:	Zdeněk Weiss, Petr Ashcheulov, Nicolas Lambert, Andrew Taylor, Jan Lorincik, Kil-dong Sung, Marina Davydova, Vincent Mortet
Rok vydání:	2023
Předmět:	Condensed Matter Physics Instrumentation Surfaces Coatings and Films
Zdroj:	Vacuum. 210:111890
ISSN:	0042-207X
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::a5d7b37bae18122a0c0fa74c98a9d185 https://doi.org/10.1016/j.vacuum.2023.111890 Zobrazit plný text záznamu Full Text from ScienceDirect