Influence of the hydrogen evolution on the structural and electronic properties of a-C:H films
| Autor: | M. Clin, K. Zellama, A. Laurent, J. Spousta, F. Portemer, Y. Bounouh, M.L. Theye, Andreas Zeinert, Jacques Perriere, M. Benlahsen |
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| Rok vydání: | 1996 |
| Předmět: |
Hydrogen
Hydrogen bond Annealing (metallurgy) Chemistry Mechanical Engineering Infrared spectroscopy chemistry.chemical_element Biasing General Chemistry Microstructure Electronic Optical and Magnetic Materials Amorphous carbon Chemical physics Materials Chemistry Electrical and Electronic Engineering Thin film |
| Zdroj: | Diamond and Related Materials. 5:453-456 |
| ISSN: | 0925-9635 |
| DOI: | 10.1016/0925-9635(95)00502-1 |
| Popis: | The nature of hydrogen bonding and its influence on the electronic properties and the atomic structure was investigated in two types of a-C:H films prepared in a d.c. multipolar plasma system from pure methane at different substrate bias, by performing H evolution and annealing experiments. The results indicate clearly that these two types of samples have different morphologies in their as-deposited state, and that they behave differently upon annealing up to high temperature. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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