Silanized polymeric working stamps for hot embossing lithography

Autor: Marion Fink, Thomas Glinsner, Z. E. Berrada, R. Jerzy, N. Bogdanski, Freimut Reuther, Hella-Christin Scheer, M. Wissen
Rok vydání: 2004
Předmět:
Zdroj: SPIE Proceedings.
ISSN: 0277-786X
DOI: 10.1117/12.532733
Popis: Pattern replication into curable imprint resists by hot embossing offers the opportunity to use the replication after crosslinking as a working-stamp. The replications of a 4” Si stamp into the thermoset imprint polymer mr-I 9000R-XP with a commercial hot embossing system (EVGroup) have been coated with an anti-adhesive layer (trichlorosilane) from the gas-phase at ambient pressure. The investigation of the quality and durability of these anti-adhesive coatings reveals that the contact angles and the replication performance of the working-stamps were independent from the fact whether the polymer was already cured or still thermoplastic during the anti-adhesive coating. The prepared 4” working-stamps themselves have been successfully replicated into a low glass transition temperature resist (mr-L 6000.5 XP) and into PMMA.
Databáze: OpenAIRE