Autor: |
Marion Fink, Thomas Glinsner, Z. E. Berrada, R. Jerzy, N. Bogdanski, Freimut Reuther, Hella-Christin Scheer, M. Wissen |
Rok vydání: |
2004 |
Předmět: |
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Zdroj: |
SPIE Proceedings. |
ISSN: |
0277-786X |
DOI: |
10.1117/12.532733 |
Popis: |
Pattern replication into curable imprint resists by hot embossing offers the opportunity to use the replication after crosslinking as a working-stamp. The replications of a 4” Si stamp into the thermoset imprint polymer mr-I 9000R-XP with a commercial hot embossing system (EVGroup) have been coated with an anti-adhesive layer (trichlorosilane) from the gas-phase at ambient pressure. The investigation of the quality and durability of these anti-adhesive coatings reveals that the contact angles and the replication performance of the working-stamps were independent from the fact whether the polymer was already cured or still thermoplastic during the anti-adhesive coating. The prepared 4” working-stamps themselves have been successfully replicated into a low glass transition temperature resist (mr-L 6000.5 XP) and into PMMA. |
Databáze: |
OpenAIRE |
Externí odkaz: |
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