16.4: Photostability Improvement of a-InGaZnO TFTs by Introducing a Transparent UV Shielding Layer

Autor: Han-Ping D. Shieh, Min Yen Tsai, Li Feng Teng, Po-Tsun Liu, Yun Chu Tsai
Rok vydání: 2013
Předmět:
Zdroj: SID Symposium Digest of Technical Papers. 44:178-181
ISSN: 0097-966X
Popis: The photosensitivity and stability of a-IGZO TFTs can be efficiently improved by introducing a transparent passivation layer made of Mo-doped ZnO (MZO). Under a negative bias illumination stress (NBIS) with photoenergy (∼3.4eV), the ΔVth of MZO-passivated TFTs was 0.39 V after 5400 sec of NBIS, whereas the unpassivated TFTs showed a large ΔVth of −10.56 V. Moreover, the unpassivated TFTs exhibited a slight positive Vth shift of 1.69 V after 5400 sec of positive bias stress (PBS), while the ΔVth of MZO-passivated TFTs was only 0.45 V.
Databáze: OpenAIRE